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Tetrafluoromethane, also known as carbon tetrafluoride, is colorless, tasteless and odorless. Insoluble in water, 0.0015 at 25 ℃ under normal pressure, soluble in chloroform and benzene. This product is non-toxic and non combustible. High concentration has anesthetic effect. The high-purity gas and its mixture with high-purity oxygen are the most widely used plasma etching gas in microelectronics industry, and can also be used as low-temperature refrigerant and insulation medium. It is inert to many reagents and does not hydrolyze at 1000 ℃. It does not react with copper, nickel and tungsten at room temperature. Because of the strong chemical stability of the C-F bond, the perfluorocarbons represented by CF4 can be considered to be basically nontoxic.
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